Search for dissertations about: "Niklas Elfström"
Found 1 swedish dissertation containing the words Niklas Elfström.
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1. Silicon Nanowires for Biomolecule Detection
Abstract : Starting from silicon on insulator (SOI) material, with a top silicon layer thickness of 100 nm, silicon nanowires were fabricated in a top down approach using electron beam (e-beam) lithography and subsequent eactive ion etching (RIE) and oxidation. Nanowires as narrow as 30 nm could be achieved. READ MORE
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