Search for dissertations about: "PECVD"

Showing result 1 - 5 of 13 swedish dissertations containing the word PECVD.

  1. 1. Technology for photonic components in silica/silicon material structure

    University dissertation from Kista : Mikroelektronik och informationsteknik

    Author : Lech Wosinski; KTH.; [2003]
    Keywords : silica-on-silicon technology; PECVD; plasma deposition; photonic integrated circuits; planar waveguide devices; UV Bragg gratings; photosensitivity; arrayed waveguide gratings; multimode interference couplers; add-drop multiplexers;

    Abstract : The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. READ MORE

  2. 2. Carbon nanomaterial-based interconnects, integrated capacitors and supercapacitors

    University dissertation from Gothenburg : Chalmers tekniska högskola

    Author : Muhammad Amin; [2017]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; carbon nanotubes; Integrated capacitors; vertically aligned carbon nanofibers; Interconnects; PECVD; Interdigitated micro-supercapacitors;

    Abstract : The constant miniaturization and steady performance improvement of electronics devices have generated innovative ideas such as internet of thing (IoT), which also includes devices with integrated energy sources. The high performance is conceived by the high density of the devices on a chip leading to a high density of interconnects, to connect these devices to outside world. READ MORE

  3. 3. Joint Interface Effects on Machining System Vibration

    University dissertation from Stockholm : KTH Royal Institute of Technology

    Author : Qilin Fu; KTH.; [2013]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Joint Interface; Vibration; Damping; Chatter; Machining; Carbon NanoComposite; PECVD; HiPIMS; SRA - Production; SRA - Produktion; Järnvägsgruppen - Ljud och vibrationer; Järnvägsgruppen - Ljud och vibrationer;

    Abstract : Vibration problems are still the major constraint in modern machining processes that seek higher material removal rate, shorter process time, longer tool life and better product quality. Depending on the process, the weaker structure element can be the tool/tool holder, workpiece/fixture or both. READ MORE

  4. 4. Tunable photonic crystals based on carbon nanofibers

    University dissertation from Stockholm : KTH Royal Institute of Technology

    Author : Robert Rehammar; [2012]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; FDTD; PECVD; Photonic crystal; carbon nanofiber; tunable; diffraction; ellipsometry;

    Abstract : Photonic crystals are materials with periodically varying refractive indices. In conventional photonic crystal design it is hard to achieve tunable structures in the visible range, i.e. structures with changeable optical properties. READ MORE

  5. 5. Synthesis and characterization of vertically aligned carbon nanofibers for nanoscale devices

    University dissertation from Stockholm : KTH Royal Institute of Technology

    Author : Farzan Alavian Ghavanini; [2011]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nanoelectromechanical systems NEMS ; Plasma enhanced chemical vapor deposition PECVD ; Vertically aligned carbon nanofibers VACNF ;

    Abstract : The synthesis of vertically aligned carbon nanofibers (VACNFs) by direct current plasma enhanced chemical vapor deposition (dc PECVD) has presented a unique opportunity to realize nanoscale three-dimensional devices at a reasonable cost. The determinism offered by the synthesis process in terms of control over the spatial and the geometrical properties of the resulting nanofibers provides a powerful tool to implement a wide range of applications from nanoelectromechanical systems to biological devices. READ MORE