Search for dissertations about: "PECVD"

Showing result 1 - 5 of 17 swedish dissertations containing the word PECVD.

  2. 1. Technology for photonic components in silica/silicon material structure

    Author : Lech Wosinski; KTH; []
    Keywords : silica-on-silicon technology; PECVD; plasma deposition; photonic integrated circuits; planar waveguide devices; UV Bragg gratings; photosensitivity; arrayed waveguide gratings; multimode interference couplers; add-drop multiplexers;

    Abstract : The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. READ MORE

  4. 2. Carbon nanomaterial-based interconnects, integrated capacitors and supercapacitors

    Author : Muhammad Amin; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; carbon nanotubes; Integrated capacitors; vertically aligned carbon nanofibers; Interconnects; PECVD; Interdigitated micro-supercapacitors;

    Abstract : The constant miniaturization and steady performance improvement of electronics devices have generated innovative ideas such as internet of thing (IoT), which also includes devices with integrated energy sources. The high performance is conceived by the high density of the devices on a chip leading to a high density of interconnects, to connect these devices to outside world. READ MORE

  5. 3. Joint Interface Effects on Machining System Vibration

    Author : Qilin Fu; Cornel-Mihai Nicolescu; Tomas Beno; KTH; []
    Keywords : Joint Interface; Vibration; Damping; Chatter; Machining; Carbon NanoComposite; PECVD; HiPIMS; SRA - Production; SRA - Produktion; Järnvägsgruppen - Ljud och vibrationer; Järnvägsgruppen - Ljud och vibrationer;

    Abstract : Vibration problems are still the major constraint in modern machining processes that seek higher material removal rate, shorter process time, longer tool life and better product quality. Depending on the process, the weaker structure element can be the tool/tool holder, workpiece/fixture or both. READ MORE

  6. 4. Carbon-nanofibre-based tunable photonic crystals

    Author : Robert Rehammar; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; transfer matrix; carbon nanofibre; fdtd; Photonic crystal; PECVD; plane wave expansion; tunable;

    Abstract : Photonic crystals are materials with periodically varying refractive indices. In conventional photonic crystal design it is hard to achieve tunable structures in the visible range. That is, structures with changeable optical properties. READ MORE

  7. 5. Tunable photonic crystals based on carbon nanofibers

    Author : Robert Rehammar; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; FDTD; PECVD; Photonic crystal; carbon nanofiber; tunable; diffraction; ellipsometry;

    Abstract : Photonic crystals are materials with periodically varying refractive indices. In conventional photonic crystal design it is hard to achieve tunable structures in the visible range, i.e. structures with changeable optical properties. READ MORE