Search for dissertations about: "Peter Woias"

Found 2 swedish dissertations containing the words Peter Woias.

  2. 1. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves

    Author : Henrik Gradin; Göran Stemme; Peter Woias; KTH; []
    Keywords : Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; wafer bonding; Au-Si; eutectic bonding; release etching; electrochemical etching; microvalves; microactuators; shape memory alloy; SMA; NiTinol; TiNi; NiTi; cold-state reset; bias spring; gate valves; wire bonding;

    Abstract : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. READ MORE

  4. 2. Paraffin Actuators in Microfluidic Systems

    Author : Marcus Lehto; Klas Hjort; Peter Woias; Uppsala universitet; []
    Keywords : Engineering physics; Paraffin; Actuators; Valve; Micropump; Teknisk fysik;

    Abstract : There is a need for reliable valves and pumps in microfluidics. A good microactuator is the key for low cost and high performance of these components.Paraffin wax is a promising material to be used as actuator material as is can produce large forces and large strokes. READ MORE