Search for dissertations about: "Planar Magnetron"

Showing result 1 - 5 of 12 swedish dissertations containing the words Planar Magnetron.

  2. 1. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  4. 2. The effect of extreme power densities applied to a planar magnetron

    Author : Johan Böhlmark; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : In plasma assisted thin film growth control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias. ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  5. 3. Materials science of magnetron sputtered fullerene-like carbon nitride thin films

    Author : Jörg Neidhardt; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Carbon nitride (CNx) is a promising compound thin film material for a variety of applications. The nano-structured fullerene-like allotrope in particular exhibits outstanding mechanical proper ties. such as extreme elasticity and toughness. due to a unique microstructure of curved and crosslinked basal planes. READ MORE

  6. 4. Multifunctional Transition-metal Diboride Coatings Synthesized by Magnetron sputtering with Synchronized Metal-ion Irradiation

    Author : Babak Bakhit; Grzegorz Greczynski; Johanna Rosén; Paul Mayrhofer; Linköpings universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Refractory transition-metal diborides (TMB2), classified as ultra-high temperature ceramics, are promising materials for extreme thermal and chemical environments. There is a growing demand for employing TMB2 in high-temperature electrodes, advanced nuclear fission reactors, molten metal containment, refractory crucibles, thermocouple protection tubes in steel baths and aluminum reduction cells, reinforcement fibers, solar power, aerospace, and armor applications. READ MORE

  7. 5. Ferroelectric Na0.5K0.5NbO3 as an electro-optic material

    Author : Mats Blomqvist; KTH; []
    Keywords : ferroelectrics; sodium potassium niobates; thin films; rf-magnetron sputtering; waveguiding; refractive index; prism coupling; dielectric tunability;

    Abstract : Ferroelectrics are a group of advanced electronic materialswith a wide variety of properties useful in applications suchas memory devices, resonators and filters, infrared sensors,microelectromechanical systems, and optical waveguides andmodulators. Among the oxide perovskite-structured ferroelectricthin film materials sodium potassium niobate or Na0. READ MORE