Search for dissertations about: "RIE"

Showing result 16 - 20 of 24 swedish dissertations containing the word RIE.

  2. 16. Experiments and modeling of thin film processes

    Author : Lars B. Jonsson; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

    Abstract : The processes employed in modern microelectronics are very sophisticated, often representing a complex combination of physical and chemical components with a large number of parameters. Our knowledge and understanding about these processes are often limited; their description is mostly empirical or semi-empirital at best. READ MORE

  4. 17. Silicon micromachining with applications in microoptics

    Author : Carola Strandman; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Elektronik; Electronics;

    Abstract : The microsystems technology (MST) is strongly evolving, constantly finding new application areas. Here, the area of microoptics is presented with examples of different solutions that MST has made possible within optical sensors, actuators, and optoelectronic systems. READ MORE

  5. 18. Mooring dynamics for wave energy applications

    Author : Johannes Palm; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; hp adaptivity; Wave energy; Coupled simulations; CFD; Discontinuous Galerkin methods; OpenFOAM; Mooring dynamics; Snap loads; RANS;

    Abstract : This work aims to increase the modelling accuracy of two important problems for the wave energy industry. One concerns the mooring dynamics in the presence of snap loads (shock waves in cable tension). The other is related to nonlinear effects in the resonance region of moored wave energy converters (WECs). READ MORE

  6. 19. High-Resolution Nanostructuring for Soft X-Ray Zone-Plate Optics

    Author : Julia Reinspach; Hans M. Hertz; Sasa Bajt; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; zone plates; x-ray optics; x-ray microscopy; high resolution; nanofabrication; electron beam lithography; reactive ion etching; tungsten; nickel; germanium;

    Abstract : Diffractive zone-plate lenses are widely used as optics in high-resolution x-ray microscopes. The achievable resolution in such microscopes is presently not limited by the x-ray wavelength but by limitations in zone-plate nanofabrication. READ MORE

  7. 20. Silicon dioxide and aluminium nitride as gate dielectric for high temperature and high power silicon carbide MOSFETs

    Author : Carl-Mikael Zetterling; KTH; []
    Keywords : ;

    Abstract : Silicon carbide (SIC) is a wide bandgap semiconductor thathas been suggested as a replacement for silicon in applicationsusing high voltages, high frequencies, high temperatures orcombinations thereof. Several basic process steps need to bedeveloped for reliable manufacturing of long-term stableelectronic devices. READ MORE