Search for dissertations about: "Reactive Sputtering"

Showing result 1 - 5 of 96 swedish dissertations containing the words Reactive Sputtering.

  1. 1. Studies of the Reactive Sputtering Process and its Application in Electro-Acoustic Devices

    Author : Daniel Rosén; Sören Berg; Ilia Katardjiev; Claes Nender; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Sputtering; Reactive Sputtering; Electro Acoustic Devices; Materialvetenskap; Materials science; Teknisk materialvetenskap;

    Abstract : Electro-acoustic devices such as surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices have been in commercial use for over 60 years and can be found in applications ranging from specialised scientific and military equipment to consumer products, such as mobile telephones, TV and radio receivers, etc. Today by far the largest market for electro-acoustic devices is the telecommunication industry which annually consumes approximately three billion acoustic wave filters for frequency control alone. READ MORE

  2. 2. Sputtering of Precursors for Cu2ZnSnS4 Solar Cells and Application of Cadmium Free Buffer Layers

    Author : Tove Ericson; Charlotte Platzer-Björkman; Tomas Kubart; Marika Edoff; Yaroslav Romanyuk; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; solar cells; thin film; buffer layer; sputtering; reactive sputtering; CZTS; kesterite; zinc tin oxide; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Abstract : The aim of this thesis is to understand the influence of the deposition process and resulting film properties on Cu2ZnSnS4 (CZTS) thin film solar cells. Two main aspects are studied, namely formation of absorber precursors by sputtering, and alternative Cd-free buffer materials with improved band alignment. READ MORE

  3. 3. Reactive sputtering and composition measurements of precursors for Cu2ZnSnS4 thin film solar cells

    Author : Tove Ericson; Charlotte Platzer-Björkman; Tomas Kubart; Marika Edoff; Anders Hallén; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Cu2ZnSnS4; Kesterite; Reactive sputtering; Process curve; Photovoltaics; Composition measurments; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Abstract : Cu2ZnSnS4 (CZTS) is a thin film solar cell material that only contains abundant elements and for which promising conversion efficiencies of 9.2 % have been shown. In this thesis composition measurements and reactive sputtering of precursors for CZTS films have been studied. These precursors can be annealed to create high quality CZTS films. READ MORE

  4. 4. Reactive Sputter Deposition of Functional Thin Films

    Author : Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Abstract : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. READ MORE

  5. 5. Reactive sputtering applied to microelectronic devices

    Author : Torbjörn Larsson; Uppsala universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : .... READ MORE