Search for dissertations about: "SILICON"

Showing result 1 - 5 of 1026 swedish dissertations containing the word SILICON.

  2. 1. Point Defects in Silicon and Silicon-Carbide

    Author : Paolo Pellegrino; KTH; []
    Keywords : silicon; silicon carbide; defects; dlts;

    Abstract : .... READ MORE

  4. 2. Silicon micromachining : methodological aspects and applications in biomedical pressure sensors

    Author : Ylva Bäcklund; Uppsala universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : .... READ MORE

  5. 3. Silicon microstructures : fabrication techniques and applications

    Author : Leif Smith; Uppsala universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : .... READ MORE

  6. 4. Silicon nanowires, nanopillars and quantum dots : Fabrication and characterization

    Author : Robert Juhasz; Jan Linnros; Philippe M. Fauchet; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon nanowires; silicon nanopillars; silicon quantum dots; size-reduction; thermal oxidation; electrochemical etching of silicon; photoluminescence; Semiconductor physics; Halvledarfysik;

    Abstract : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. READ MORE

  7. 5. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

    Author : Markus Forsberg; Jörgen Olsson; Jyrki Molarius; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; Electronics; Elektronik;

    Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE