Search for dissertations about: "Selective etching"

Showing result 1 - 5 of 26 swedish dissertations containing the words Selective etching.

  2. 1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems

    Author : Niklaus Frank; KTH; []
    Keywords : adhesive; wafer; bonding; low temperature; CMOS compatible; selective; local; polymer; thermoplastic; thermosetting; intermediate layer; coating; benzocyclobutene; BCB; photoresist; epoxy; glue; wafer-level; sacrificial; etching; grinding; etch-stop;

    Abstract : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. READ MORE

  4. 2. Source and drain engineering in SiGe-based pMOS transistors

    Author : Christian Isheden; Mikael Östling; Simon Deleonibus; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; SiGe; source drain; shallow junctions; pMOS; process integration; CVD; epitaxy; etching; Ni silicide; contact resistivity; Elektronik; Electronics; Elektronik;

    Abstract : A new shallow junction formation process, based on selective silicon etching followed by selective growth of in situ B-doped SiGe, is presented. The approach is advantageous compared to conventional ion implantation followed by thermal activation, because perfectly abrupt, low resistivity junctions of arbitrary depth can be obtained. READ MORE

  5. 3. Electrical Characterization of Silicon Nanogaps

    Author : Jonas Berg; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Organic molecules; Molecular electronics; Surface leakage currents; Low-frequency noise; Soft breakdown; TSRAM; Resonant tunneling diodes; Selective etching; Silicon nanogaps; Nanocontacts;

    Abstract : We have designed and manufactured silicon nanogaps aimed at electrically interfacing molecules, utilizing the precision thickness control in an oxidation process. An insulating layer was formed on a silicon wafer, and then polysilicon was deposited on top. READ MORE

  6. 4. Venturing Further into the Field of 2D Materials and their Laminated Parent Phases

    Author : Pernilla Helmer; Johanna Rosén; Jonas Björk; Martin Dahlqvist; Hannu-Pekka Komsa; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Density Functional Theory; Bonding analysis; Themodynamical stability; Electronic band structure; Computational screening; Dynamical stability; Nanolaminate; MXene; 2D material; Boridene; Chemical exfoliation; Selective etching;

    Abstract : The field of 2D materials is a relatively young and rapidly growing area within materials science, which is concerned with atomically thin states of matter. Because of their intrinsic 2D morphology, 2D materials have exceptionally high surface to weight or surface to volume ratio. READ MORE

  7. 5. Silicon nanogaps: An electronic bridge to the molecular world

    Author : Jonas Berg; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Nanocrystals; TSRAM; Silicon nanogaps; Molecular electronics; Selective etching; Resonant Tunneling Diodes; Molecules;

    Abstract : We have designed and manufactured silicon nanogaps aimed at electrically interfacing molecules, utilizing the precision thickness control in an oxidation process. An insulating layer was formed on a silicon wafer, and then polysilicon was deposited on top. READ MORE