Search for dissertations about: "Sequential infiltration synthesis"

Found 1 swedish dissertation containing the words Sequential infiltration synthesis.

2. 1. Block Copolymer Nanolithography for Sub-50 nm Structure Applications

   Author : Anette Löfstrand; NanoLund: Centre for Nanoscience; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Sampolymer; riktad självorganisation; ytrekonstruktion; mönsteröverföring; sekventiell infiltrationssyntes; neutronreflektometri; Block copolymer; Directed self-assembly; Surface reconstruction; Pattern transfer; Sequential infiltration synthesis; Neutron reflectometry; Fysicumarkivet A:2021:Löfstrand;

   Abstract : As high technology device patterns are continuing to move towards decreasing critical dimensions and increasing pattern density, there is a need for lithography to move in the same direction. Block copolymer (BCP) lithography is a promising technique, which has single digit nanometer resolution, has a pattern periodicity of about 7-200 nm, and easily scales up to large area at a low cost. READ MORE