Search for dissertations about: "Ta2O5"

Showing result 1 - 5 of 10 swedish dissertations containing the word Ta2O5.

  1. 1. CVD and ALD of Group IV- and V-Oxides for Dielectric Applications

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Katarina Forsgren; Uppsala universitet.; [2001]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Chemistry; CVD; ALD; Dielectric constant; Tantalum oxide; Ta2O5; Zirconium oxide; ZrO2; Hafnium oxide; HfO2; QCM; Kemi; NATURAL SCIENCES Chemistry; NATURVETENSKAP Kemi; Inorganic Chemistry; oorganisk kemi;

    Abstract : Due to the constantly decreasing dimensions of electronic devices, the conventional dielectric material in transistors and capacitors, SiO2, has to be replaced by a material with higher dielectric constant. Some of the most promising candidates are tantalum oxide,Ta2O5, zirconium oxide, ZrO2 and hafnium oxide, HfO2. READ MORE

  2. 2. Employing Metal Iodides and Oxygen in ALD and CVD of Functional Metal Oxides

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Jonas Sundqvist; Uppsala universitet.; [2003]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Inorganic chemistry; CVD; ALD; tantalum oxide; hafnium oxide; tin oxide; epitaxy; Ta2O5; HfO2; SnO2; XRD; Oorganisk kemi; NATURAL SCIENCES Chemistry Inorganic chemistry; NATURVETENSKAP Kemi Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

    Abstract : Many materials exhibit interesting and novel properties when prepared as thin films. Thin film metal oxides have had an impact on the technological progress of the microelectronics mainly due to their electrical and optical properties. READ MORE

  3. 3. AlN and High-k Thin Films for IC and Electroacoustic Applications

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Fredrik Engelmark; Uppsala universitet.; [2002]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; TECHNOLOGY Electrical engineering; electronics and photonics Electronics; TEKNIKVETENSKAP Elektroteknik; elektronik och fotonik Elektronik; Elektronik; Electronics;

    Abstract : Further, a highly selective dry etch process for etching Al on AlN has been developed for the fabrication of MIM, MIS, SAW and BAW test structures for electrical and electroacoustic characterization of the films. A dielectric constant of 10 for AlN and 25 for Ti doped Ta2O5 have been measured. READ MORE

  4. 4. Charged Particle Transport: As Information Source about Ion Conductors, Dielectric Materials, and Drug Delivery Systems

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Göran Frenning; Uppsala universitet.; [2002]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; TECHNOLOGY Materials science; TEKNIKVETENSKAP Teknisk materialvetenskap; Engineering Science; teknisk fysik med inriktning mot fasta tillståndets fysik;

    Abstract : This thesis treats charged particle transport, mostly in solid materials but also, to some extent, in aqueous media. Three major types of materials have been investigated; dielectric materials, ion conductors, and drug-delivery systems. READ MORE

  5. 5. Carbothermal synthesis of transition metal carbide and carbonitride whiskers via a Vapour-Liquid-Solid (VLS) growth mechanism

    University dissertation from Stockholm : Stockholm University

    Author : Niklas Ahlén; Stockholms universitet.; [1999]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; oorganisk kemi; Inorganic Chemistry;

    Abstract : A route for the synthesis of TiC, TiCyN1-y, TaxTi1-xC and TaxTi1-xCyN1-y whiskers via a carbothermal Vapour-Liquid-Solid (VLS) growth mechanism, yielding 70-90 vol.% whiskers, has been established. The whiskers were uniform in diameter (0.3-0. READ MORE