Search for dissertations about: "Wlodek Kaplan"

Found 1 swedish dissertation containing the words Wlodek Kaplan.

2. 1. The use of self-aligned Ti silicide in integrated Si technology

   Author : Wlodek Kaplan; KTH; []
   Keywords : ;

   Abstract : The performance and cost efficiency of integrated circuits(IC) are constantly improved by a miniaturization of theindividual device dimensions. As a consequence, the materialand electrical properties of conductors and contacts becomecritical, and fabrication technology development meets newchallenges from the continuous reduction of devicedimensions. READ MORE