Search for dissertations about: "Xuge Fan"
Found 1 swedish dissertation containing the words Xuge Fan.
University dissertation from KTH Royal Institute of Technology
Abstract : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. READ MORE