Search for dissertations about: "Z-correction"

Found 1 swedish dissertation containing the word Z-correction.

  1. 1. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

    Author : Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

    Abstract : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. READ MORE