Search for dissertations about: "beam lithography"

Showing result 1 - 5 of 95 swedish dissertations containing the words beam lithography.

  2. 1. Direct writing with an MeV proton beam: Development and Applications

    Author : Vaida Auzelyte; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; direct writing; beam control; Physics; Fysik; Teknik; Technological sciences; proton beam; lithography; Fysicumarkivet A:2006:Auželytė;

    Abstract : This thesis presents work aimed at the development and application of a new lithography system for direct material patterning with the MeV proton beam at the Lund Nuclear Microprobe (NMP) facility. MeV proton beams are advantageous for use as a patterning tool due to their deep and well defined penetration through matter and their highly local energy deposition. READ MORE

  4. 2. Bioelectronic Nanosensor Devices for Environmental and Biomedical Analysis

    Author : Klas Risveden; Tillämpad biokemi; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; Regional Ion Sensitive Field Effect Transistor; Region Ion Sensitive Field Effect Transistor; RISFET; Conducting channel; Bioelectronic Nanosensor; Bioelectronic; Biosensor; Nanosensor; Chemical Sensor; Sensor; Semiconductor sensor; Single molecule trapping; Scaling; Protein trapping; Nanoelectronics; Lab-on-a-chip; pico-ammeter; Nanobiosensor; Sample Applicator; Sequential Batch Analysis; Sequential Batch Analysis System; SBAS; Nanowire; Branched nanowire structure; Nanotree; Nanorod; Nano processing; Micro processing; Electron Beam Lithography; EBL; UV-lithography; Molecular Imprinting; DUV-lithography; Moleculary Imprinted Polymers; MIP; Biomimetics; QCM; Biomimetic sensor; Quartz Crystal Microbalance; QCM-D; Nanoparticles; Acetylcholine esterase; Glucose oxidase; Glucose; Gluconolactone; Propranolol; Gluconate; Carbofuran; Neurotoxic; Environmental analysis; Biomedical Analysis; Biotechnology; Medicine; Pesticide; Food Technology; Analyis; Flow Injection Analysis; FIA; Scanning Probe Microscopy; Scanning Kelvin Probe Microscopy; SPM; KPM; AFM; SKM; KPFM; SKPM; Nanostructures.; Atomic Force Microscopy; KFM;

    Abstract : A new type of Bioelectronic Nanosensor Device with potential applications in medicine,biotechnology and environmental analysis was designed. The nanosensor is based on RISFET (Regional Ion Sensitive Field Effect Transistor) technology. READ MORE

  5. 3. Fabrication and Applications of a Focused Ion Beam Based Nanocontact Platform for Electrical Characterization of Molecules and Particles

    Author : Tobias Blom; Klaus Leifer; Maria Strömme; Michel Calame; Uppsala universitet; []
    Keywords : Focused Ion Beam; FIB; Scanning Electron Microscopy; SEM; Nanogap electrodes; Nanostructuring; Nanofabrication; Electron Beam Lithography; Electrical characterization; Dielectrophoresis;

    Abstract : The development of new materials with novel properties plays an important role in improving our lives and welfare. Research in Nanotechnology can provide e.g. cheaper and smarter materials in applications such as energy storage and sensors. READ MORE

  6. 4. Micro-Flow Reactors for Kinetic Studies of Model Catalysts made by Electron-Beam Lithography

    Author : Stefan Johansson; Chalmers University of Technology; []
    Keywords : bistability; catalysis; nano-fabrication; supported model catalyst; CO oxidation; electron-beam lithography EBL ; micro-reactor;

    Abstract : The main objective of this work is to explore the potential of using electron beam lithography (EBL) to prepare well defined supported model catalysts, which can be used for catalytic research. The work has involved three major areas (i) EBL-fabrication of catalysts, (ii) design of a micro-flow reactor for catalytic evaluation, and (iii) problem oriented research using EBL-fabricated model catalysts. READ MORE

  7. 5. Diffractive Optical Elements: Fabrication, Replication, and Applications and Optical Properties of a Visual Field Test

    Author : Fredrik Nikolajeff; Chalmers University of Technology; []
    Keywords : perimetry; beam homogenizing; antireflection; high-pass spatial frequency target; proximity effect; electron beam lithography; replication; successive development; diffractive optical element; axicon;

    Abstract : This thesis mainly treats the fabrication, replication and applications of diffractive optical elements. A smaller part deals with optical properties of a visual field test. Diffractive optical elements are computer-generated micro-optic components that use diffraction to manipulate light. READ MORE