Search for dissertations about: "christer rydberg"

Found 2 swedish dissertations containing the words christer rydberg.

2. 1. Partially Coherent Laser Radiation - Modeling and Application to Optical Microlithography

   Author : Christer Rydberg; Chalmers tekniska högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; microlithography; coherence; temporal speckle; partial coherence; optical propagation; number of degrees of freedom; dynamic speckle;

   Abstract : This work deals with a type of light that has properties somewhere between blackbody radiation and conventional laser light; such light is referred to as partially coherent. One example is the radiation from the pulsed excimer laser, which is used in the manufacturing of most of the worlds integrated circuits. READ MORE

4. 2. Statistical optics and optical elements for microtechnologies: Partial coherence, lithography and microlenses

   Author : Christer Rydberg; Chalmers tekniska högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; inverse methods; microlenses; optical propagation; partial coherence; dynamic speckle; lithography;

   Abstract : The scientific problems treated in this thesis are expressed within the framework ofstatistical optics and are generated out of the optical lithography industry. Opticallithography uses partially coherent light, i.e. light with a random wavefront, toincrease the performance of the lithographic process. READ MORE