Search for dissertations about: "debris-free"
Found 1 swedish dissertation containing the word debris-free.
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1. A new laser-plasma X-ray source for microscopy and lithography
Abstract : A new high-brightness source for soft X-rays and EUV-radiation has been developed. This laser-plasma source utilizes a microscopic liquid droplet or jet as target. The result is a reduction of debris emission by several orders of magnitude compared to conventional laser plasmas. READ MORE
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