Search for dissertations about: "dry etch"

Showing result 1 - 5 of 15 swedish dissertations containing the words dry etch.

  1. 1. Elastic interconnection micro contact stuctures-manufacture and characterisation

    Author : Slavko Dejanovic; Mittuniversitetet; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; elastic contact; silicone elastomer; chip socket; contact resistance; via hole; RIE; dry etch; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

    Abstract : ...The task that was put to the author of this thesis was to find solutions for manufacturing of single elastic micro bump contacts as well as complete elastic sockets and interconnections down to the carrier substrate. READ MORE

  2. 2. Ion beam etching of InP based materials

    Author : Carl-Fredrik Carlström; KTH; []
    Keywords : InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

    Abstract : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. READ MORE

  3. 3. Top-down Fabrication Technologies for High Quality III-V Nanostructures

    Author : Shagufta Naureen; Srinivasan Anand; Clivia M. Sotomayor Torres; KTH; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; III-V nanostructures; colloidal lithography; top-down fabrication; dry etching; quantum well; multilayer structures; nanowires; nanopillars; nanodisks; mono-layer etching; surface passivation; photoluminescence; carrier life time; total reflectivity; photonic crystals; nanomesh;

    Abstract : III-V nanostructures have attracted substantial research effort due to their interesting physical properties and their applications in new generation of ultrafast and high efficiency nanoscale electronic and photonic components. The advances in nanofabrication methods including growth/synthesis have opened up new possibilities of realizing one dimensional (1D) nanostructures as building blocks of future nanoscale devices. READ MORE

  4. 4. Two-Dimensional Photonic Crystals in InP-based Materials

    Author : Mikaël Mulot; KTH; []
    Keywords : Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Abstract : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. READ MORE

  5. 5. Technology and properties of InP-based photonic crystal structures and devices

    Author : Naeem Shahid; Srinivasan Anand; Rob W. vad der Heijden; KTH; []
    Keywords : Integrated optics materials; Photonic crystals; Planar waveguides; Dispersion; Band-gap; Mode-gap; mini-stopband; InP; Nanostructure fabrication; dry etching; mass transport; material reflow; reliability; SRA - ICT; SRA - Informations- och kommunikationsteknik;

    Abstract : Photonic crystals (PhCs) are periodic dielectric structures that exhibit a photonic band gap; a range of wavelengths for which light propagation is forbidden. 2D PhCs exhibit most of the properties as their three dimension counterparts with a compatibility with standard semiconductor processing techniques such as epitaxial growth, electron beam lithography, Plasma deposition/etching and electromechanical lapping/polishing. READ MORE