Search for dissertations about: "dry etch"
Showing result 6 - 10 of 15 swedish dissertations containing the words dry etch.
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6. Silicon micromachining with applications in microoptics
Abstract : The microsystems technology (MST) is strongly evolving, constantly finding new application areas. Here, the area of microoptics is presented with examples of different solutions that MST has made possible within optical sensors, actuators, and optoelectronic systems. READ MORE
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7. Experiments and modeling of thin film processes
Abstract : The processes employed in modern microelectronics are very sophisticated, often representing a complex combination of physical and chemical components with a large number of parameters. Our knowledge and understanding about these processes are often limited; their description is mostly empirical or semi-empirital at best. READ MORE
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8. Processing and characterization of GaN/SiC heterojunctions and SiC bipolar transistors
Abstract : Silicon Carbide (SiC) and Gallium Nitride (GaN) are bothwide bandgap semiconductors that have been suggested for highpower, high voltage, and high temperature applications. Themost investigated SiC devices so far are the Schottky diode,PiN diode and the field effect transistor. READ MORE
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9. InP-based photonic crystals : Processing, Material properties and Dispersion effects
Abstract : Photonic crystals (PhCs) are periodic dielectric structures that exhibit a photonic bandgap, i.e., a range of wavelength for which light propagation is forbidden. The special band structure related dispersion properties offer a realm of novel functionalities and interesting physical phenomena. READ MORE
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10. Design and process issues of junction- and ferroelectric-field effect transistors in silicon carbide
Abstract : In todays solid-state electronics, Si and SiO2 are thedominant materials used. However, new materials such as SiC orferroelectrics are required for some special applications sincesuperior characteristics can be achieved in electronic devices. READ MORE