Search for dissertations about: "etching silicon"

Showing result 1 - 5 of 95 swedish dissertations containing the words etching silicon.

1. Silicon nanowires, nanopillars and quantum dots : Fabrication and characterization

Author : Robert Juhasz; Jan Linnros; Philippe M. Fauchet; KTH; []
Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon nanowires; silicon nanopillars; silicon quantum dots; size-reduction; thermal oxidation; electrochemical etching of silicon; photoluminescence; Semiconductor physics; Halvledarfysik;

Abstract : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. READ MORE
2. Silicon nanowire based devices for More than Moore Applications

Author : Ganesh Jayakumar; Per-Erik Hellström; Mikael Östling; Luca Selmi; KTH; []
Keywords : silicon nanowire; biosensor; CMOS; sequential integration; lab-on-chip; LOC; high-K; high-K integration on SiNW biosensor; ALD; fluid gate; back gate; SiNW; SiNW pixel matrix; FEOL; pattern transfer lithography; sidewall transfer lithography; STL; multi-target bio detection; BEOL; nanonets; silicon nanonets; SiNN-FET; SiNW-FET; CMOS integration of nanowires; CMOS integration of nanonets; monolithic 3D integration of nanowires; above-IC integration of nanowires; DNA detection using SiNW; SiNW biosensor; dry environment DNA detection; DNA hybridization detection using SiNW; SiNW functionalization; SiNW silanization; SiNW grafting; FEOL integration of SiNW; BEOL integration of SiNW; sequential multiplexed biodetection; biodetection efficiency of SiNW; front end of line integration of SiNW; back end of line integration of SiNW; SiNW dry environment functionalization; APTES cross-linker; accessing SiNW test site; fluorescence microscopy of SiNW; geometry of SiNW; SiNW biosensor variability; top-down fabrication of SiNW; bottom-up fabrication of SiNW; VLS method; ams foundry CMOS process; adding functionality in BEOL process; sensor integration in BEOL process; hafnium oxide; HfO2; aluminium oxide; Al2O3; TiN backgate; Nickel source drain; ISFET; ion sensitive field effect transistor; Overcoming Nernst limit of detection using SiNW; SiNW sub-threshold region operation; ASIC; SOC; SiGe selective epitaxy; epitaxial growth of SiNW; epitaxial growth of nanowires; epitaxial growth of nanonets; nickel silicide contacts; salicide process; high yield SiNW fabrication; high volume SiNW fabrication; silicon ribbon; SiRi pixel; SiRi biosensor; SiRi DNA detection; monolithic 3D integration of nanonets; above-IC integration of nanonets; impact of back gate voltage on silicon nanowire; impact of back gate voltage on SiNW; FDSOI; fully depleted silicon on insulator technology; metal backgate; wafer scale integration of SiNW; wafer scale integration of nanonets; impact of backgate voltage on CMOS inverter circuit; frequency divider; D flip-flop; Informations- och kommunikationsteknik; Information and Communication Technology;

Abstract : Silicon nanowires (SiNW) are in the spotlight for a few years in the research community as a good candidate for biosensing applications. This is attributed to their small dimensions in nanometer scale that offers high sensitivity, label-free detection and at the same time utilizing small amount of sample. READ MORE
3. Silicon and Quartz Microengineering : Processing and Characterisation

Author : Örjan Vallin; Peter Enoksson; Uppsala universitet; []
Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Engineering physics; silicon; quartz; microengineering; microstructure; MEMS; wafer bonding; direct bonding; adhesion quantification; Teknisk fysik; Engineering physics; Teknisk fysik;

Abstract : Microengineering has developed a broad range of production techniques to reduce size, increase throughput, and reduce cost of electrical and mechanical devices. The miniaturisation has also entailed entirely new opportunities. READ MORE
4. Silicon neural interfaces -Design and biomedical aspects-

Author : Lars Wallman; Avdelningen för Biomedicinsk teknik; []
Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Elektronik och elektroteknik; Electronics and Electrical technology; pn-etch stop; biocompatibility; neural recordings; porous silicon; silicon; neural interface; sieve electrode; General biomedical sciences; Biomedicinska vetenskaper allmänt ;

Abstract : This thesis covers the development of a silicon neural interface, with focus on silicon sieve electrode fabrication, design, nerve regeneration, signal recording and biocompatibility. A study of how the via hole size and transparency of the perforated sieve membrane influences the nerve regeneration is presented together with a study on soft tissue responses to planar and porous silicon. READ MORE
5. Silicon Nanopore Arrays : Fabrication and Applications for DNA Sensing

Author : Miao Zhang; Jan Linnros; Meni Wanunu; KTH; []
Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; nanopore; array; electrochemical etching; DNA; optics; thermophoresis;

Abstract : Nanopore biomolecule sensing and sequencing has emerged as a simple but powerful tool for single molecule studies over the past two decades. By elec- trophoretically driving single molecules through a nanometer-sized pore, often sitting in an insulating membrane that separates two buffer solutions, ionic current blockades can be detected to reveal rich information of the molecules, such as DNA length, protein size and conformation, even nucleic acid se- quence. READ MORE

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