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Found 1 swedish dissertation matching the above criteria.

2. 1. Hydrogen diffusion and ion implantation in silicon carbide

   Author : Martin Janson; KTH; []
   Keywords : heat abd tgernidtbanucs; electronics and electrical; materials science;

   Abstract : Secondary ion mass spectrometry (SIMS) has been employed tostudy the spatial distributions resulting from mass transportby diffusion and ion implantation in single crystal siliconcarbide (SiC). By a systematic analysis of this data,fundamental processes that govern these phenomena have beenderived. READ MORE