Search for dissertations about: "high power impulse magnetron sputtering"

Showing result 1 - 5 of 31 swedish dissertations containing the words high power impulse magnetron sputtering.

  1. 1. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  2. 2. Modeling High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. READ MORE

  3. 3. High power impulse magnetron sputtering under industrial conditions

    Author : Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Tomáš Kubart; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. READ MORE

  4. 4. Plasma properties in high power impulse magnetron sputtering

    Author : Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Abstract : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). READ MORE

  5. 5. Reactive High Power Impulse Magnetron Sputtering of Metal Oxides

    Author : Montri Aiempanakit; Ulf Helmersson; Tomas Kubart; Straňák Vítězslav; Linköpings universitet; []
    Keywords : ;

    Abstract : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. READ MORE