Search for dissertations about: "hithesh k gatty"

Found 1 swedish dissertation containing the words hithesh k gatty.

2. 1. MEMS-based electrochemical gas sensors and wafer-level methods

   Author : Hithesh K Gatty; Göran Stemme; Roxhed Niclas; Anita Lloyd Spetz; KTH; []
   Keywords : MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

   Abstract : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. READ MORE