Search for dissertations about: "hybrid PVD PE-CVD"

Found 1 swedish dissertation containing the words hybrid PVD PE-CVD.

  1. 1. Plasma Enhanced Chemical- and Physical- Vapor Depositions Using Hollow Cathodes

    Author : Kaspars Siliņš; Hana Barankova; Ladislav Bardos; Claes Nender; Uppsala universitet; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Hollow cathode; TiN; AlN; amorphous carbon; hybrid PVD PE-CVD; ionized magnetron;

    Abstract : Development of coating deposition technologies, in terms of performance and costs, is an ongoing process. A promising class of deposition technologies are based on hollow cathode discharges. READ MORE