Search for dissertations about: "hybrid PVD PE-CVD"
Found 1 swedish dissertation containing the words hybrid PVD PE-CVD.
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1. Plasma Enhanced Chemical- and Physical- Vapor Depositions Using Hollow Cathodes
Abstract : Development of coating deposition technologies, in terms of performance and costs, is an ongoing process. A promising class of deposition technologies are based on hollow cathode discharges. READ MORE
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