Search for dissertations about: "hydrophilic wafer bonding"
Found 2 swedish dissertations containing the words hydrophilic wafer bonding.
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1. The influence of surface microroughness on wafer bonding
Abstract : .... READ MORE
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2. Fabrication and Characterization of Si-on-SiC Hybrid Substrates
Abstract : In this thesis, we are making a new approach to fabricate silicon on insulator (SOI). By replacing the buried silicon dioxide and the silicon handling wafer with silicon carbide through hydrophilic wafer bonding, we have achieved silicon on crystalline silicon carbide for the first time and silicon on polycrystalline silicon carbide substrates at 150 mm wafer size. READ MORE
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