Search for dissertations about: "implantation induced pas"

Found 2 swedish dissertations containing the words implantation induced pas.

2. 1. Capacitance Spectroscopy of Point Defects in Silicon and Silicon Carbide

   Author : Denny Åberg; KTH; []
   Keywords : capacitance spectrocopy; deep levels; deep level transient spectroscopy; thermal donors; thermal double donors; ultra shallow thermal donors; chemical kinetics; silicon carbide; ion implantation; implantation induced defects; implantation induced pas;

   Abstract : .... READ MORE

4. 2. Hydrogen diffusion and ion implantation in silicon carbide

   Author : Martin Janson; KTH; []
   Keywords : heat abd tgernidtbanucs; electronics and electrical; materials science;

   Abstract : Secondary ion mass spectrometry (SIMS) has been employed tostudy the spatial distributions resulting from mass transportby diffusion and ion implantation in single crystal siliconcarbide (SiC). By a systematic analysis of this data,fundamental processes that govern these phenomena have beenderived. READ MORE