Search for dissertations about: "ionized magnetron"

Showing result 1 - 5 of 18 swedish dissertations containing the words ionized magnetron.

  2. 1. Plasma Characterization & Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering

    Author : Jones Alami; Ulf Helmersson; James Bradley; Linköpings universitet; []
    Keywords : Highly ionized pulsed magnetron sputtering; HPPMS; HPPIMS; thin film; plasma analysis; Langmuir probe; TECHNOLOGY; TEKNIKVETENSKAP;

    Abstract : The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). READ MORE

  4. 2. Plasma Enhanced Chemical- and Physical- Vapor Depositions Using Hollow Cathodes

    Author : Kaspars Siliņš; Hana Barankova; Ladislav Bardos; Claes Nender; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Hollow cathode; TiN; AlN; amorphous carbon; hybrid PVD PE-CVD; ionized magnetron;

    Abstract : Development of coating deposition technologies, in terms of performance and costs, is an ongoing process. A promising class of deposition technologies are based on hollow cathode discharges. READ MORE

  5. 3. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  6. 4. Modeling High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. READ MORE

  7. 5. Plasma properties in high power impulse magnetron sputtering

    Author : Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Abstract : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). READ MORE