Search for dissertations about: "johan böhlmark"

Found 2 swedish dissertations containing the words johan böhlmark.

2. 1. Fundamentals of High Power Impulse Magnetron Sputtering

   Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

   Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

4. 2. The effect of extreme power densities applied to a planar magnetron

   Author : Johan Böhlmark; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES;

   Abstract : In plasma assisted thin film growth control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias. ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE