Search for dissertations about: "lithography"
Showing result 6 - 10 of 190 swedish dissertations containing the word lithography.
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6. Electrochemical and mechanical thin film sensors
Abstract : This thesis focuses on the study of thin-film sensor technologies, novel microfabrication technologies, and thin-film technology in general. The work discusses electrochemical sensors and mechanical sensor technologies as well as fabrication strategies for them. READ MORE
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7. Low and High Energy Ion Beams in Nanotechnology
Abstract : In this thesis, two ways of fabrication of nanometer-sized semiconductor features are presented. Low Energy Ion Implantation (LEII) has been used to create shallow (sub-50 nm) and laterally small (5 m m – 200 nm) features by 10 keV As+ doping of B background doped Si. READ MORE
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8. Direct writing with an MeV proton beam: Development and Applications
Abstract : This thesis presents work aimed at the development and application of a new lithography system for direct material patterning with the MeV proton beam at the Lund Nuclear Microprobe (NMP) facility. MeV proton beams are advantageous for use as a patterning tool due to their deep and well defined penetration through matter and their highly local energy deposition. READ MORE
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9. Fabrication of Low-Dimensional Structures in III-V Semiconductors
Abstract : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. READ MORE
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10. Single-Proton Irradiation of Living Cells - Development of New Tools for Low-Dose Radiation Research
Abstract : A Single-Ion Hit Facility (SIHF) consists of a custom-build facility based in particle accelerators which offers irradiation controlling the number of delivered particles with a precise targeting localization. The irradiation spot can be confined down to the nanometre scale allowing the irradiation of subcellular compartments with a single particle. READ MORE