Search for dissertations about: "low energy IBA"

Found 3 swedish dissertations containing the words low energy IBA.

  2. 1. Low and High Energy Ion Beams in Nanotechnology

    Author : Thomas Winzell; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; ion implantation; magnetic materials; ERDA; nanometer structures; Nuclear physics; MeV Ions; lithography; Kärnfysik; Fysicumarkivet A:2000:Winzell;

    Abstract : In this thesis, two ways of fabrication of nanometer-sized semiconductor features are presented. Low Energy Ion Implantation (LEII) has been used to create shallow (sub-50 nm) and laterally small (5 m m – 200 nm) features by 10 keV As+ doping of B background doped Si. READ MORE

  4. 2. Development of New Experimental Facilities at the Lund Nuclear Microprobe Laboratory

    Author : Asad Shariff; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; low energy tailing; sub-micron beam; PRAM; grid shadow; Kärnfysik; Nuclear physics; GUPIX; Ion Beam Analysis; PIXE; Fysicumarkivet A:2004:Shariff;

    Abstract : Ion beam analysis techniques are now well established as research tools for a broad range of multidisciplinary scientific fields. The ability to focus an ion beam down to micrometer size has expanded and strengthened the capability of IBA techniques to a higher level. READ MORE

  5. 3. Applications of Ion Beam Methods in Silicide/Si and Silicide/GaAs Nanometre Structures

    Author : Yanwen Zhang; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Phase formation; Nanometre structures; silicide; detection efficiency; Ion Beam Analysis; Ion Beam Synthesis; Time-of-Flight Energy Elastic Recoil Detection ToF-E ERD ; implantation; Fysicumarkivet A:1998:Zhang; Kärnfysik; Nuclear physics; Detla E-E ERD;

    Abstract : Ion beam methods are used to analyse material (Ion Beam Analysis, IBA) and to modify the target (Ion Beam Modification of Materials, IBMM). In this thesis, ion beams have been used in various IBA techniques to investigate the surface nanometre structures, and also in an ion beam synthesis (IBS) technique to form thin films and to modify material properties. READ MORE