Search for dissertations about: "mönsteröverföring"

Found 2 swedish dissertations containing the word mönsteröverföring.

2. 1. Block Copolymer Nanolithography for Sub-50 nm Structure Applications

   Author : Anette Löfstrand; NanoLund: Centre for Nanoscience; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Sampolymer; riktad självorganisation; ytrekonstruktion; mönsteröverföring; sekventiell infiltrationssyntes; neutronreflektometri; Block copolymer; Directed self-assembly; Surface reconstruction; Pattern transfer; Sequential infiltration synthesis; Neutron reflectometry; Fysicumarkivet A:2021:Löfstrand;

   Abstract : As high technology device patterns are continuing to move towards decreasing critical dimensions and increasing pattern density, there is a need for lithography to move in the same direction. Block copolymer (BCP) lithography is a promising technique, which has single digit nanometer resolution, has a pattern periodicity of about 7-200 nm, and easily scales up to large area at a low cost. READ MORE

4. 2. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers

   Author : Marc Beck; Fasta tillståndets fysik; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; electrochemistry; interdigitated array; anti-adhesion; anti-sticking; stamp; mold; monolayer deposition; Fysik; post-imprint processes; Physics; transducer; nanoimprint lithography; sensor; Fysicumarkivet A:2003:Beck;

   Abstract : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. READ MORE