Search for dissertations about: "magnetron sputtering AL"

Showing result 1 - 5 of 44 swedish dissertations containing the words magnetron sputtering AL.

2. 1. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

   Author : Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

   Abstract : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. READ MORE

4. 2. Reactive Sputter Deposition of Functional Thin Films

   Author : Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Abstract : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. READ MORE

5. 3. Investigations of the corrosion resistances of magnetron sputtered multicomponent materials : A study on high entropy alloys, high entropy sublattice ceramics, and metallic glasses

   Author : Aishwarya Srinath; Leif Nyholm; Ulf Jansson; Rebecka Lindblad; Bernard Normand; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Corrosion resistance; high entropy alloys; magnetron sputtering; thin films; protective coatings;

   Abstract : The corrosion resistances of sputter deposited AlCrNbYZrN, CrNbTiTaWC and TaNiSiC alloys were assessed in acidic and alkaline environments. Compositionally complex alloying strategies, and whether they produced coatings with superior corrosion resistances, were explored. READ MORE

6. 4. Alumina Thin Films : From Computer Calculations to Cutting Tools

   Author : Erik Wallin; Ulf Helmersson; Patrick Desjardins; Linköpings universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Alumina; thin films; coatings; sputtering; density functional theory; high power impulse magnetron sputtering; HIPIMS; Material physics with surface physics; Materialfysik med ytfysik; Surface engineering; Ytbehandlingsteknik; Surfaces and interfaces; Ytor och mellanytor;

   Abstract : The work presented in this thesis deals with experimental and theoretical studies related to alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. READ MORE

7. 5. Deposition of Al-doped ZnO films by high power impulse magnetron sputtering

   Author : Martin Mickan; David Horwat; Ulf Helmersson; Aline Rougier; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES;

   Abstract : Transparent conducting oxides (TCOs) are an important class of materials with many applications such as low emissivity coatings, or transparent electrodes for photovoltaics and flat panel displays. Among the possible TCO materials, Al-doped ZnO (AZO) is studied due to its relatively low cost and abundance of the raw materials. READ MORE