Search for dissertations about: "maskless lithography"
Found 1 swedish dissertation containing the words maskless lithography.
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1. Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Abstract : Micromirror-based maskless lithography has recently received attention as an attractive candidate to tackle challenges associated with the continued de-vice scaling in the semiconductor industry. The micromirrors work by diffrac-tion and the requirements on planarity are very tough, e.g. peak-to-valley dif-ferences of a few nanometers. READ MORE
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