Search for dissertations about: "microacoustic"

Found 1 swedish dissertation containing the word microacoustic.

2. 1. Advanced MEMS Pressure Sensors Operating in Fluids

   Author : Emil Anderås; Ventsislav Yantchev; Ilia Katardjiev; Jörgen Olsson; Enrico Verona; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; pressure sensor; piezoresistance; nanofilms; AlN; microacoustic; Lamb wave; thin film; resonator; sensitivity; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Abstract : Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors.In this thesis two different pressure sensor techniques are studied. READ MORE