Search for dissertations about: "micromachining"

Showing result 1 - 5 of 45 swedish dissertations containing the word micromachining.

  1. 1. Silicon micromachining : methodological aspects and applications in biomedical pressure sensors

    Author : Ylva Bäcklund; Uppsala universitet; []

    Abstract : .... READ MORE

  2. 2. Micromachining by sacrificial aluminium etching

    Author : David Westberg; Chalmers University of Technology; []
    Keywords : sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

    Abstract : .... READ MORE

  3. 3. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

    Author : Umer Shah; Joachim Oberhammer; Raafat Mansour; KTH; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; Radio frequency microelectromechanical systems; RF MEMS; Micromachined transmission line; Micromachining; Tuneable capacitor; Switched capacitor; Coupled-line coupler; Tuneable directional coupler; Intermodulation distortion; MEMS varactor; Two-tone IIP3 measurement; Passive components and circuits; Reliability; Magnetic materials; NiFe multilayer composite; Permeability; Permittivity; Micromachined inductors;

    Abstract : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. READ MORE

  4. 4. Polymer Microoptics in Silicon Micromachining

    Author : Karin Hedsten; Chalmers University of Technology; []
    Keywords : MOEMS; amorphous fluorocarbon polymer; polymer microlens; silicon micromachining; replication; refractive lenses; diffractive optics; MEMS; Cytop™; transmissive microoptics; reflow;

    Abstract : MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the advanced state of silicon processing to fabricate complex electro-mechanical structures and devices. Microoptics is a new, but advanced technology within the field of optics. READ MORE

  5. 5. Exploiting the Terahertz Spectrum with Silicon Micromachining : Waveguide Components, Systems and Metrology

    Author : James Campion; Joachim Oberhammer; Umer Shah; Robert M. Weikle II; KTH; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Terahertz; Silicon Micromachining; Waveguide; Waveguide System; Metrology; Electrical Engineering; Elektro- och systemteknik;

    Abstract : The terahertz spectrum (300 GHz - 3 THz) represents the final frontier for modern electronic and optical systems, wherein few low-cost, volume-manufacturable solutions exist. THz frequencies are of great scientific and commercial interest, with applications as diverse as radio astronomy, sensing and imaging and wireless communications. READ MORE