Search for dissertations about: "micromachining"

Showing result 6 - 10 of 50 swedish dissertations containing the word micromachining.

2. 6. Submillimeter-Wave Waveguide Frontends by Silicon-on-Insulator Micromachining

   Author : Adrian Gomez-Torrent; Joachim Oberhammer; Umer Shah; Goutam Chattopadhyay; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; antenna; orthomode transducer; switch; waveguide; radiofrequency; beamforming network; submillimeter-wave; terahertz; silicon micromachining; deep reactive ion etching; silicon on insulator; Electrical Engineering; Elektro- och systemteknik;

   Abstract : This thesis presents novel radiofrequency (RF) frontend components in the submillimeter-wave (sub-mmW) range implemented by silicon micromachining, or deep reactive ion etching (DRIE). DRIE is rapidly becoming a driving technology for the fabrication of waveguide components and systems when approaching the terahertz (THz) frequency range. READ MORE

4. 7. Integrated Antennas : Monolithic and Hybrid Approaches

   Author : Erik Öjefors; Anders Rydberg; Sayan Mukherjee; Duixian Liu; Uppsala universitet; []
   Keywords : Electronics; antenna travelling wave arrays; antenna phased arrays; phase shifters; micromachining; silicon; monolithic microwave integrated circuits; dipole antennas; loop antennas; slot antennas; Elektronik;

   Abstract : This thesis considers integration of antennas and active electronics manufactured on the same substrate. The main topic is on-chip antennas for commercial silicon processes, but hybrid integration using printed circuit board technology is also addressed. READ MORE

5. 8. Additive Manufacturing and Integration of 3D MEMS using Ultrafast Lasers and Magnetic Assembly

   Author : Simone Pagliano; Frank Niklaus; Göran Stemme; Gijs Krijnen; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; additive manufacturing; 3D printing; 3D micromachining; two-photon polymerization; MEMS; polyimide; ultrafast laser; laser micromachining; vertical integration; magnetic assembly; stochastic assembly; diminutive chips;

   Abstract : The geometry of MEMS devices is limited by the technologies used to fabricate them. Today, microsystems are manufactured with patterning technologies that allow only for 2D and 2.5D geometries. READ MORE

6. 9. Femtosecond Laser Microfabrication of Glasses and 2D Materials for Photonics and Energy Storage

   Author : Po-Han Huang; Frank Niklaus; Göran Stemme; Kristinn Gylfason; Yves Bellouard; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Femtosecond laser; 3D printing; self-organized nanogratings; micromachining; silica glass; silicon-rich glass; hydrogen silsesquioxane; photonic microdevice; microsupercapacitor; 2D materials; direct ink writing; Electrical Engineering; Elektro- och systemteknik;

   Abstract : Femtosecond laser-based fabrication technologies have seen rapid developments in the past decades, thanks to the capability of femtosecond lasers to induce localized multiphoton absorption in materials. Multiphoton absorption can result in various material modifications that can be leveraged for additive and subtractive manufacturing. READ MORE

7. 10. Silicon micromachined waveguide components for terahertz systems

   Author : Bernhard Beuerle; Joachim Oberhammer; Umer Shah; Kamal Sarabandi; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromachining; waveguide; terahertz; deep reactive ion etching; silicon on insulator; on-wafer characterization; InP; SiGe; Electrical Engineering; Elektro- och systemteknik;

   Abstract : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. READ MORE