Search for dissertations about: "montri aiempanakit"

Found 1 swedish dissertation containing the words montri aiempanakit.

  1. 1. Reactive High Power Impulse Magnetron Sputtering of Metal Oxides

    Author : Montri Aiempanakit; Ulf Helmersson; Tomas Kubart; Straňák Vítězslav; Linköpings universitet; []
    Keywords : ;

    Abstract : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. READ MORE