Search for dissertations about: "negative e-beam resist"

Found 2 swedish dissertations containing the words negative e-beam resist.

  2. 1. Advances in Soft Matter Nanofabrication

    Author : Mehrnaz Shaali; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; photolithography; negative e-beam resist; monolayer; confocal microscopy; Teflon AF; KPFM; DNA origami; cells; lipid nanotube; AFM; double bilayer; Phospholipid; electron beam lithography;

    Abstract : The focus of this thesis is placed on the fabrication of engineered nanodevices for the manipulation of soft matter thin films. By combining top-down micro- and nanofabrication approaches with bottom-up self-assembly strategies, new research platforms were developed, tested and characterized. READ MORE

  4. 2. Silicon-based Photonic Devices : Design, Fabrication and Characterization

    Author : Ziyang Zhang; Min Qiu; Thomas Koch; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Photonic Devices; Silicon Photonics; Parallel Computation; Nanofabrication; Electron Beam Lithography; Optical Characterisation; Optics; Optik;

    Abstract : The field of Information and Communication Technologies is witnessing a development speed unprecedented in history. Moore’s law proves that the processor speed and memory size are roughly doubling each 18 months, which is expected to continue in the next decade. READ MORE