Search for dissertations about: "nitrided interfaces"

Found 1 swedish dissertation containing the words nitrided interfaces.

2. 1. Deposition of high quality thin dielectrics on silicon

   Author : Lars-Åke Ragnarsson; Chalmers tekniska högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; oxynitride; metal-oxide-semiconductor capacitors; RPECVD; silicon dioxide; interfaces; si-SiO2; remote plasma-enhanced CVD; ONO; C-V; nitrided interfaces; SiO2; deposited dielectrics;

   Abstract : .... READ MORE