Search for dissertations about: "oxygen wafer bonding"
Showing result 1 - 5 of 8 swedish dissertations containing the words oxygen wafer bonding.
-
1. Wafer Bonding for Spaceflight Applications : Processing and Characterisation
Abstract : Bonding techniques intended for assembling space microsystems are studied in this work. One of the largest problems in bonding pre-processed semiconductor wafers are the severe process restrictions imposed by material compatibility issues. READ MORE
-
2. Oxygen plasma assisted silicon wafer bonding
Abstract : .... READ MORE
-
3. Plasma assisted low temperature semiconductor wafer bonding
Abstract : Direct semiconductor wafer bonding has emerged as a technology to meet the demand foradditional flexibility in materials integration. The applications are found in microelectronics, optoelectronics and micromechanics. For instance, wafer bonding is used to produce silicon-on-insulator (SOI) wafers. READ MORE
-
4. The RDGT - Integration of Micromechanics and Electronics by Plasma Assisted Wafer Bonding
Abstract : A high-resolution capacitive sensing technique is presented in this thesis: the Resonant Double Gate Transistor (RDGT). The major advantage of the RDGT compared to "pure" capacitive sensing techniques is its low output impedance because of the direct capacitance to current conversion of the transistor. READ MORE
-
5. Low temperature transfer bonding for MEMS. Utilizing and characterizing oxygen plasma assisted direct wafer bonding
Abstract : Transfer bonding enables the integration of devices, e.g. integrated circuits (ICs) and transducers, fabricated using processes and/or designs that are not compatible with each other as well as double sided micromachining of thin films. READ MORE