Search for dissertations about: "oxynitride"

Showing result 1 - 5 of 17 swedish dissertations containing the word oxynitride.

  2. 1. Deposition of high quality thin dielectrics on silicon

    Author : Lars-Åke Ragnarsson; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; oxynitride; metal-oxide-semiconductor capacitors; RPECVD; silicon dioxide; interfaces; si-SiO2; remote plasma-enhanced CVD; ONO; C-V; nitrided interfaces; SiO2; deposited dielectrics;

    Abstract : .... READ MORE

  4. 2. Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

    Author : Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Jón Tómas Guðmundsson; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. READ MORE

  5. 3. Structural characterization of complex inorganic materials using solid-state NMR spectroscopy

    Author : Hua Guo; Ulrich Häusserman; Sven Lidin; Stockholms universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; solid-state NMR; materials characterization; inorganic materials; Calcium phosphate cements; bone-substitution materials; Mixed-anion compounds; perovskite; Oxyhydride materials; Oxynitride materials; Barium titanate; Strontium vanadate; oorganisk kemi; Inorganic Chemistry;

    Abstract : Over the past decades, advancements in technology have relied greatly on the development of new functional inorganic materials. Detailed structural characterization of these materials is key for the understanding and also prediction of chemical and physical properties. READ MORE

  6. 4. Preparation, characterization and properties of nitrogen rich glasses in alkaline earth-Si-O-N systems

    Author : Ali Sharafat; Saeid Esmaeilzadeh; Stuart Hampshire; Stockholms universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Oxynitride glasses; glass forming region; nitrogen content; hardness; refractive index; Inorganic chemistry; Oorganisk kemi; oorganisk kemi; Inorganic Chemistry;

    Abstract : Nitrogen rich glasses in the systems Ca-Si-O-N, Sr-Si-O-N and AE-Ca-Si-O-N (AE = Mg, Sr and Ba) have been prepared using a novel glass-synthesis route. The limits of the glass forming regions in the Ca and Sr systems and substitution limits in the AE-Ca-Si-O-N systems have been determined and physical properties of the glasses measured. READ MORE

  7. 5. On the preparation and structure of O-sialons

    Author : Jörgen Sjöberg; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; silicon oxynitride; Sialon; ammonia; crystal structure; nitridation; extended X-ray absorption fine structure; nuclear magnetic resonance; neutron diffraction;

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