Search for dissertations about: "photomask"

Found 4 swedish dissertations containing the word photomask.

  2. 1. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

    Author : Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

    Abstract : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. READ MORE

  4. 2. Partially Coherent Laser Radiation - Modeling and Application to Optical Microlithography

    Author : Christer Rydberg; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; microlithography; coherence; temporal speckle; partial coherence; optical propagation; number of degrees of freedom; dynamic speckle;

    Abstract : This work deals with a type of light that has properties somewhere between blackbody radiation and conventional laser light; such light is referred to as partially coherent. One example is the radiation from the pulsed excimer laser, which is used in the manufacturing of most of the worlds integrated circuits. READ MORE

  5. 3. A Stacked Prism Lens Concept for Next-Generation Hard X-Ray Telescopes

    Author : Wujun Mi; Mats Danielsson; Peter Nillius; Ralf K. Heilmann; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; focusing X-ray telescopes; Wolter-I optics; stacked prism lens; focused UV lithography; grayscale e-beam lithography; proximity effect correction; angular resolution; effective collecting area; röntgenteleskop; Wolter-I-optik; staplade prismalinser; fokuserad UV-litografi; elektronstråle-litografi; Fysik; Physics;

    Abstract : Over the past half century, the focusing X-ray telescope has played a very prominent role in X-ray astronomy at the frontier of fundamental physics. The finer angular resolution and increased effective area have enabled more and more exciting discoveries and detailed studies of the high-energy universe, including the cosmic X-ray background (CXB) radiation, black holes in active galactic nuclei (AGN), galaxy clusters, supernova remnants, and so on. READ MORE

  6. 4. Reflective structural colors and their actuation using electroactive conducting polymers

    Author : Stefano Rossi; Magnus Jonsson; Eleni Stavrinidou; Laura Na Liu; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Structural colors; Reflective displays; Optical nanocavities; Conducting polymers; Electrochemical tuning.;

    Abstract : The integration of inorganic photonic nanostructures with organic materials opens new possibilities to dynamically modify the optical response of photonic devices. This thesis focuses on how to generate efficient reflective structural colors and tune them in combination with a conducting polymer (CP). READ MORE