Search for dissertations about: "poly silicon"

Showing result 1 - 5 of 29 swedish dissertations containing the words poly silicon.

2. 1. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

   Author : Markus Forsberg; Jörgen Olsson; Jyrki Molarius; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; Electronics; Elektronik;

   Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE

4. 2. The influence of surface microroughness on wafer bonding

   Author : Mats Bergh; Chalmers tekniska högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; AFM; hydrophilic; surface roughness; diamond; silicon-on-insulator; poly silicon; silicon-on-diamons; atomic force microscope; wafer bonding; SOI; aluminum nitride; hydrophobic;

   Abstract : .... READ MORE

5. 3. Polymers at the Electrode-Electrolyte Interface : Negative Electrode Binders for Lithium-Ion Batteries

   Author : Fabian Jeschull; Daniel Brandell; Bernard Lestriez; Uppsala universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; binder; CMC-Na; PAA; graphite; silicon; lithium-ion battery; photoelectron spectros-copy; Kemi med inriktning mot materialkemi; Chemistry with specialization in Materials Chemistry; Kemi med inriktning mot polymerkemi; Chemistry with specialization in Polymer Chemistry; Chemistry with specialization in Physical Chemistry; Kemi med inriktning mot fysikalisk kemi;

   Abstract : We are today experiencing an increasing demand for high energy density storage devices like the lithium-ion battery for applications in portable electronic devices, electric vehicles (EV) and as interim storage for renewable energy. High capacity retention and long cycle life are prerequisites, particularly for the EV market. READ MORE

6. 4. Light emitting devices based on silicon nanostructures

   Author : Nenad Lalic; KTH; []
   Keywords : ;

   Abstract : Although silicon is the dominant semiconductor today, lightemitting devices are currently based on compound semiconductorsdue to their direct band-gap, which promotes fast radiativerecombination. However, in nanometer-size silicon structures,carrier confinement enhances the radiative recombination,while, at the same time, suppresses diffusion to non-radiativerecombination centra, resulting in a significant increase inlight emission efficiency. READ MORE

7. 5. Chemical Vapor Depositionof Si and SiGe Films for High-Speed Bipolar Transistors

   Author : Johan Pejnefors; KTH; []
   Keywords : chemical vapor deposition CVD ; bipolar junction transistor BJT ; heterojunction bipolar transistor HBT ; silicon-germanium SiGe ; epitaxy; poly-Si emitter; in situ doping; non-selective epitaxy NSEG ; loading effect; emissivity effect;

   Abstract : This thesis deals with the main aspects in chemical vapordeposition (CVD) of silicon (Si) and silicon-germanium (Si1-xGex) films for high-speed bipolar transistors.In situdoping of polycrystalline silicon (poly-Si)using phosphine (PH3) and disilane (Si2H6) in a low-pressure CVD reactor was investigated toestablish a poly-Si emitter fabrication process. READ MORE