Search for dissertations about: "reactive co-sputtering"
Showing result 1 - 5 of 7 swedish dissertations containing the words reactive co-sputtering.
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1. NbTiN for improved superconducting detectors
Abstract : The physics of single photons is fascinating, by manipulating them we can observe and probe quantum effects. Doing so requires the fabrication and utilization of single photon sources, of which many types have been developed including quantum dots, trapped atoms and ions, and color centers. READ MORE
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2. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Abstract : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. READ MORE
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3. Growth of Wide-Band Gap AlN and (SiC)x(AlN)1-x Thin Films by Reactive Magnetron Sputter Deposition
Abstract : The research presented in this thesis is focused on thin film synthesis of epitaxial wurtzite structure aluminum nitride (AlN) and related alloy, (SiC)x(AlN)1-x,by ultra-high-vacuum (UHV) reactive magnetron sputter deposition, on silicon carbide (6H-SiC) substrates. The emphasis of the work is on controlling the growth and quality of the films to be able to use the materials in electronic device applications. READ MORE
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4. Structure and properties of Si-C-N and B-C-N thin films prepared by magnetron sputtering
Abstract : Carbon nitride-based materials, grown by magnetron sputtering have been studied concerning microstructure and mechanical properties. Carbon nitride was alloyed with Si or B, and grown as a constituent in a layered structure. READ MORE
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5. Synthesis and Evaluation of TaC:C Low-Friction Coatings
Abstract : In the large family of carbon-based coatings there are members capable of providing a rare and very desirable combination of high wear resistance and low friction. The field of application for this kind of coatings is steadily increasing which, naturally, give raise to new questions and demands. READ MORE