Search for dissertations about: "release etching"

Showing result 1 - 5 of 6 swedish dissertations containing the words release etching.

2. 1. Wafer-level heterogeneous integration of MEMS actuators

   Author : Stefan Braun; Göran Stemme; Martin A. Schmidt; KTH; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; transfer integration; packaging; assembly; wafer bonding; adhesive bonding; eutectic bonding; release etching; electrochemical etching; microvalves; microactuator; Shape Memory Alloy; SMA; NITINOL; TiNi; NiTi; cold-state reset; bias spring; stress layers; crossbar switch; routing; switch; switch array; electrostatic actuator; S-shaped actuator; zipper actuator; addressing; transfer stamping; blue tape; Computer engineering; Datorteknik;

   Abstract : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. READ MORE

4. 2. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves

   Author : Henrik Gradin; Göran Stemme; Peter Woias; KTH; []
   Keywords : Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; wafer bonding; Au-Si; eutectic bonding; release etching; electrochemical etching; microvalves; microactuators; shape memory alloy; SMA; NiTinol; TiNi; NiTi; cold-state reset; bias spring; gate valves; wire bonding;

   Abstract : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. READ MORE

5. 3. Metal release from stainless steel and CoCrMo alloys in protein-rich environments – effects of protein aggregation, friction, and irradiation

   Author : Zheng Wei; Yolanda Hedberg; Inger Odnevall Wallinder; Daniel Klint; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Metal release; stainless steel; CoCrMo; protein aggregation; friction; irradiation; Vroman effect; Kemi; Chemistry;

   Abstract : Highly corrosion-resistant alloys are used in sensitive environments such as the human body and food environments. However, even tiny amounts of released metals from these surfaces could potentially cause adverse effects. It is hence important to study the biointerface between corrosion-resistant alloys and protein-rich environments. READ MORE

6. 4. Micromachined epitaxial colossal mognetoresistors for uncooled infrared bolometer

   Author : Joo-Hyung Kim; Alexander M. Grishin; Yael Nemirosky; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; La0.67 Sr; Ca 0.33MnO3 LSCMO ; La0.67Sr0.33MnO3 LSMO ; Electrophysics; Elektrofysik;

   Abstract : High quality perovskite manganites, La1-xAxMnO3 (A = Ca, Sr, Ba) are very attractive materials due to their great application potential for magnetic memory, uncooled infrared (IR) microbolometer and spintronics devices. This thesis presents studies of the growth and material characterization (including structural, electrical, magnetic and noise) of epitaxial manganite films on Si and GaAs. READ MORE

7. 5. Superconducting kinetic inductance devices for nanoscale force sensing

   Author : August K. Roos; David B. Haviland; Hélène le Sueur; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; optomechanics; force sensing; atomic force microscopy; kinetic inductance; superconductivity; strain; meandering nanowires; optomekanik; kraftavkänning; atomkraftsmikroskopi; kinetisk induktans; supraledning; töjning; slingrande nanotrådar; Material and Nano Physics; Material- och nanofysik;

   Abstract : In this thesis, we present a force sensor for atomic force microscopy based on cavity optomechanical principles. We explain the function, design, fabrication and characterisation of the force sensor. The mechanical part of the force sensor consists of a cantilever with a very fine tip. READ MORE