Search for dissertations about: "shallow junctions"
Found 4 swedish dissertations containing the words shallow junctions.
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1. The influence of process-induced defects on electrical properties of silicon junctions
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2. Source and drain engineering in SiGe-based pMOS transistors
Abstract : A new shallow junction formation process, based on selective silicon etching followed by selective growth of in situ B-doped SiGe, is presented. The approach is advantageous compared to conventional ion implantation followed by thermal activation, because perfectly abrupt, low resistivity junctions of arbitrary depth can be obtained. READ MORE
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3. Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials
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4. Modeling and characterization of novel MOS devices
Abstract : Challenges with integrating high-κ gate dielectric,retrograde Si1-xGexchannel and silicided contacts in future CMOStechnologies are investigated experimentally and theoreticallyin this thesis. ρMOSFETs with either Si or strained Si1-xGex surface-channel and different high-κgate dielectric are examined. READ MORE