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Showing result 1 - 5 of 64 swedish dissertations matching the above criteria.

  2. 1. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

    Author : Markus Forsberg; Jörgen Olsson; Jyrki Molarius; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; Electronics; Elektronik;

    Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE

  4. 2. Properties of buried silicon dioxide layers

    Author : Per Ericsson; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; BESOI; charge tripping; radiation damage; silicon on insulator; separation by imlanted oxygen; bond and etchback SOI; SIMOX; thermal stress; SOI; charge injection;

    Abstract : .... READ MORE

  5. 3. Deterministic Silicon Pillar Assemblies and their Photonic Applications

    Author : Bikash Dev Choudhury; Anand Srinivasan; Harish Bhaskaran; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; nanopillar; nanowires; nanophotonics; nanofabrication; silicon; photovoltaics; second-harmonic generation; top-down approach; colloidal lithography; color filter; biosensor; Fysik; Physics; Teknisk materialvetenskap; Materials Science and Engineering;

    Abstract : It is of paramount importance to our society that the environment, life style, science and amusement flourish together in a balanced way. Some trends in this direction are the increased utilization of renewable energy, like solar photovoltaics; better health care products, for example advanced biosensors; high definition TV or high resolution cameras; and novel scientific tools for better understanding of scientific observations. READ MORE

  6. 4. Deposition of high quality thin dielectrics on silicon

    Author : Lars-Åke Ragnarsson; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; oxynitride; metal-oxide-semiconductor capacitors; RPECVD; silicon dioxide; interfaces; si-SiO2; remote plasma-enhanced CVD; ONO; C-V; nitrided interfaces; SiO2; deposited dielectrics;

    Abstract : .... READ MORE

  7. 5. Fabrication and characterization of single luminescing quantum dots from 1D silicon nanostructures

    Author : Benjamin Bruhn; Jan Linnros; Luca Dal Negro; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; silicon; quantum dot; nanocrystal; nanowire; nanostructure; photoluminescence;

    Abstract : Silicon as a mono-crystalline bulk semiconductor is today the predominant material in many integrated electronic and photovoltaic applications. This has not been the case in lighting technology, since due to its indirect bandgap nature bulk silicon is an inherently poor light emitter. READ MORE