Search for dissertations about: "silicon thesis"

Showing result 1 - 5 of 809 swedish dissertations containing the words silicon thesis.

  1. 1. Point Defects in Silicon and Silicon-Carbide

    University dissertation from Kista : Mikroelektronik och informationsteknik

    Author : Paolo Pellegrino; KTH.; [2001]
    Keywords : silicon; silicon carbide; defects; dlts;

    Abstract : .... READ MORE

  2. 2. Silicon micromachining : methodological aspects and applications in biomedical pressure sensors

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Ylva Bäcklund; Uppsala universitet.; [1992]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : .... READ MORE

  3. 3. Silicon microstructures : fabrication techniques and applications

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Leif Smith; Uppsala universitet.; [1993]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : .... READ MORE

  4. 4. Silicon nanowires, nanopillars and quantum dots Fabrication and characterization

    University dissertation from Stockholm : KTH

    Author : Robert Juhasz; KTH.; [2005]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon nanowires; silicon nanopillars; silicon quantum dots; size-reduction; thermal oxidation; electrochemical etching of silicon; photoluminescence; NATURAL SCIENCES Physics Condensed matter physics Semiconductor physics; NATURVETENSKAP Fysik Kondenserade materiens fysik Halvledarfysik;

    Abstract : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. READ MORE

  5. 5. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Markus Forsberg; Uppsala universitet.; [2004]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; TECHNOLOGY Electrical engineering; electronics and photonics Electronics; TEKNIKVETENSKAP Elektroteknik; elektronik och fotonik Elektronik;

    Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE