Search for dissertations about: "silicon wafers"

Showing result 1 - 5 of 48 swedish dissertations containing the words silicon wafers.

  2. 1. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

    Author : Markus Forsberg; Jörgen Olsson; Jyrki Molarius; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; Electronics; Elektronik;

    Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE

  4. 2. Monocrystalline-Silicon Based RF MEMS Devices

    Author : Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
    Keywords : RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Abstract : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. READ MORE

  5. 3. Termination and passivation of Silicon Carbide Devices

    Author : Maciej Wolborski; Anders Hallén; Jan Szmidt; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon Carbide; SiC; passivation; dielectric materials; Semiconductor physics; Halvledarfysik;

    Abstract : Silicon carbide rectifiers are commercially available since 2001, and MESFET switches are expected to enter the market within a year. Moreover, three inch SiC wafers can be purchased nowadays without critical defects for the device performance and four inch substrate wafers are announced for the year 2005. READ MORE

  6. 4. Horizontal Slot Waveguides for Silicon Photonics Back-End Integration

    Author : Maziar A. M. Naiini; Mikael Östling; Jörge Schulze; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; silicon photonics; slot waveguides; grating couplers; CMOS tech- nology; high-k; ALD; germanium photodetectors; graphene photodetectors; pho- tonic integrated circuits;

    Abstract : This thesis presents the development of integrated silicon photonic devices. These devices are compatible with the present and near future CMOS technology. High-khorizontal grating couplers and waveguides are proposed. READ MORE

  7. 5. Silicon micromachined waveguide components for terahertz systems

    Author : Bernhard Beuerle; Joachim Oberhammer; Umer Shah; Kamal Sarabandi; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromachining; waveguide; terahertz; deep reactive ion etching; silicon on insulator; on-wafer characterization; InP; SiGe; Electrical Engineering; Elektro- och systemteknik;

    Abstract : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. READ MORE