Search for dissertations about: "sputter"

Showing result 1 - 5 of 80 swedish dissertations containing the word sputter.

  2. 1. Preparation and Characterization of Sputter Deposited Spectrally Selective Solar Absorbers

    Author : Kristina Gelin; Ewa Wäckelgård; Arne Roos; Björn Karlsson; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Engineering physics; spectrally selective solar absorber; thermal emittance; solar absorptance; sputter deposition; infrared reflectance; Teknisk fysik; Engineering physics; Teknisk fysik;

    Abstract : The optical efficiency of a commercially available sputter deposited spectrally selective solar absorber was improved. The main purposes were to decrease the thermal emittance, increase the solar absorbtance of the absorber and to protect the substrate from degradation due to environmental influence. READ MORE

  4. 2. Magnetron Sputter Epitaxy of GaN

    Author : Muhammad Junaid; Jens Birch; Lars Hultman; Vanya Darakchieva; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : Electronic-grade GaN (0001) epilayers have been grown directly on Al2O3 (0001) substrates by reactive DC-magnetron sputter epitaxy (MSE) from a liquid Ga sputtering target in an Ar/N2 atmosphere. The as-grown GaN epitaxial film exhibit low threading dislocation density on the order of ≤ 1010 cm-2 obtained by transmission electron microscopy and modified Williamson-Hall plot. READ MORE

  5. 3. Reactive Sputter Deposition of Functional Thin Films

    Author : Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Abstract : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. READ MORE

  6. 4. Magnetron Sputter Epitaxy of Group III-Nitride Semiconductor Nanorods

    Author : Alexandra Serban; Jens Birch; Ching-Lien Hsiao; Per Ola Åke Persson; Lars Hultman; Kimberly Thelander; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : The III-nitride semiconductors family includes gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN), and related ternary and quaternary alloys. The research interest on this group of materials is sparked by the direct bandgaps, and excellent physical and chemical properties. READ MORE

  7. 5. Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods

    Author : Muhammad Junaid; Jens Birch; Lars Hultman; K. Scott Butcher; Linköpings universitet; []
    Keywords : ;

    Abstract : In this research, electronic-grade GaN(0001) epilayers and nanorods have been grown onto Al2O3(0001) and Si(111) substrates, respectively, by reactive magnetron sputter epitaxy (MSE) using liquid Ga as a sputtering target. MSE, employing ultra high vacuum conditions, high-purity source materials, and lowenergy ion assisted deposition from substrate biasing, is a scalable method, lending itself to large area GaN synthesis. READ MORE