Search for dissertations about: "surface micromachining"

Showing result 1 - 5 of 22 swedish dissertations containing the words surface micromachining.

  2. 1. Micromachining by sacrificial aluminium etching

    Author : David Westberg; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

    Abstract : .... READ MORE

  4. 2. Bright Lights: Innovative Micro- and Nano-Patterning for Sensing and Tissue Engineering

    Author : Alessandro Enrico; Göran Stemme; Frank Niklaus; Anna Herland; Jürgen Brugger; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; nanotechnology; nanowires; microfabrication; tissue engineering; crack-lithography; direct writing; femtosecond lasers; two-photon polymerization; 3D micromachining; cavitation molding; scalable optical patterning; 2D materials; surface structuring; bacterial-surface interaction.; Electrical Engineering; Elektro- och systemteknik;

    Abstract : Light is the primary source of energy on our planet and has been a significant driver in the evolution of human society and technology. Light finds applications in two-dimensional (2D) photolithography and three-dimensional (3D) printing, where a pattern is transferred to a material of interest by ultraviolet (UV) light exposure, and in laser scribing and cutting, where high power lasers are used to pattern the surface of objects or cut through the bulk of the material of interest. READ MORE

  5. 3. Additive Manufacturing and Integration of 3D MEMS using Ultrafast Lasers and Magnetic Assembly

    Author : Simone Pagliano; Frank Niklaus; Göran Stemme; Gijs Krijnen; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; additive manufacturing; 3D printing; 3D micromachining; two-photon polymerization; MEMS; polyimide; ultrafast laser; laser micromachining; vertical integration; magnetic assembly; stochastic assembly; diminutive chips;

    Abstract : The geometry of MEMS devices is limited by the technologies used to fabricate them. Today, microsystems are manufactured with patterning technologies that allow only for 2D and 2.5D geometries. READ MORE

  6. 4. Femtosecond Laser Microfabrication of Glasses and 2D Materials for Photonics and Energy Storage

    Author : Po-Han Huang; Frank Niklaus; Göran Stemme; Kristinn Gylfason; Yves Bellouard; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Femtosecond laser; 3D printing; self-organized nanogratings; micromachining; silica glass; silicon-rich glass; hydrogen silsesquioxane; photonic microdevice; microsupercapacitor; 2D materials; direct ink writing; Electrical Engineering; Elektro- och systemteknik;

    Abstract : Femtosecond laser-based fabrication technologies have seen rapid developments in the past decades, thanks to the capability of femtosecond lasers to induce localized multiphoton absorption in materials. Multiphoton absorption can result in various material modifications that can be leveraged for additive and subtractive manufacturing. READ MORE

  7. 5. Polymer Microoptics in Silicon Micromachining

    Author : Karin Hedsten; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; MOEMS; amorphous fluorocarbon polymer; polymer microlens; silicon micromachining; replication; refractive lenses; diffractive optics; MEMS; Cytop™; transmissive microoptics; reflow;

    Abstract : MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the advanced state of silicon processing to fabricate complex electro-mechanical structures and devices. Microoptics is a new, but advanced technology within the field of optics. READ MORE