Search for dissertations about: "surface micromachining"

Showing result 1 - 5 of 14 swedish dissertations containing the words surface micromachining.

  1. 1. Micromachining by sacrificial aluminium etching

    Author : David Westberg; Chalmers University of Technology; []
    Keywords : sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

    Abstract : .... READ MORE

  2. 2. Polymer Microoptics in Silicon Micromachining

    Author : Karin Hedsten; Chalmers University of Technology; []
    Keywords : MOEMS; amorphous fluorocarbon polymer; polymer microlens; silicon micromachining; replication; refractive lenses; diffractive optics; MEMS; Cytop™; transmissive microoptics; reflow;

    Abstract : MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the advanced state of silicon processing to fabricate complex electro-mechanical structures and devices. Microoptics is a new, but advanced technology within the field of optics. READ MORE

  3. 3. Surface-Micromachined Vertical-Cavity Micro-Opto-Electro-Mechanical Devices on InP

    Author : Nicolae Chitica; KTH; []
    Keywords : MOEMS; Optical MEMS; InP; GaInAsP; VCSEL; MOVPE; surface micromachining; tunable devices; vertical cavity devices; air-gap reflectors; III-V micromechanics;

    Abstract : .... READ MORE

  4. 4. Gap Waveguide Technology for Millimeter Wave Applications and Integration with Antennas

    Author : Elena Pucci; Chalmers University of Technology; []
    Keywords : Array Antennas.; Microstrip Lines; Micromachining; Artificial Magnetic Conductors; Millimeter Waves; Waveguide Resonators; Packaging of Microwave Components; Gap Waveguides; Losses;

    Abstract : The increasing advance of short range wireless communications requiring high data rates and the lack of available spectrum have driven researchers and industry to move towards higher frequencies, in particular to the millimeter wave range. The opening of this wide portion of free spectrum has risen a large interest in developing mm-wave communication systems for commercial applications. READ MORE

  5. 5. Assembly of microsystems for optical and fluidic applications

    Author : Sjoerd Haasl; Göran Stemme; Richard Syms; KTH; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; Applied mechanics; microsystem technology; micromachining; assembly; active alignment; BCB; Teknisk mekanik; Engineering mechanics; Teknisk mekanik;

    Abstract : This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. READ MORE